ST-500

• Applicable gas：Gas
• Flow range：Gas　10SCCM～100SLM
• Accuracy：±1%S.P.(10～100%F.S.) ±0.1%F.S.(2～10%F.S.)
• PI … Pressure Insensitive
• Stable control of the gas flow without effect by pressure fluctuations.
• Metal seal
• EtherCAT, other major fieldbuses
• Gas panel mount, W seal/C seal joint compatible
• S.P. accuracy
• Responses in 1 sec in the full range of flow control
• Multi-range function using a dedicated app (30～100%F.S.)